- Home
- About UCIMRI
- Director's Message
- Executive Committee
- Faculty Advisory Committee
- Directory
- Map and Direction
- Facilities
- Center for Transmission Electron Microscopy (CTEM)
- Laboratory for Electron and X-ray Instrumentation (LEXI)
- Materials Characterization Center (MC2)
- Surface Science Facility (SSF)
- TEMPR (thermal, elemental, mechanical, physical and rheological) facility
- Instron 3300 Dual Column Universal Testing System
- Micromeretics Pycnometer
- Micromeritics Surface Characterization Analyzer
- Netzsch Libra TGA
- Netzsch Polyma DSC
- Netzsch Simultaneous Thermal Analyzer (STA)
- TA Instruments DSC 2500 Differential Scanning Calorimeter
- TA Instruments Hybrid Rheometer
- TA Instruments Q500 Thermal Gravimetric Analyzer
- TA Instruments Q800 Dynamic Mechanical Analyzer
- Thermo FlashSmart combustion and pyrolysis analyzer
- ThermoiCAPRQ C2 ICP-MS system
- Wyatt / Waters Gel Permeation Chromatography w/ Multi-angle Light Scattering
- IMRI Facilities in general
- Contact Us
- IMRI Management Structure
- Job Opportunities
- IMRI Brochures
- User Facilities
- IMRI Instruments
- Transmission Electron Microscopes (TEM)
- Scanning Electron Microscope-Focus Ion Beam systems (SEM-FIB)
- X-ray Diffractometers (XRDs)
- Surface Analysis
- 3-Dimensional Imaging and Analysis
- Thermal, Elemental, Mechanical, Physical and Rheological properties
- Netzsch Libra TGA
- Netzsch Polyma DSC
- Instron 3300 Dual Column Universal Testing System
- Micromeretics Pycnometer
- Micromeritics Surface Characterization Analyzer
- TA Instruments DSC 2500 Differential Scanning Calorimeter
- TA Instruments Hybrid Rheometer
- TA Instruments Q500 Thermal Gravimetric Analyzer
- TA Instruments Q800 Dynamic Mechanical Analyzer
- Thermo FlashSmart combustion and pyrolysis analyzer
- ThermoiCAPRQ C2 ICP-MS system
- Wyatt / Waters Gel Permeation Chromatography w/ Multi-angle Light Scattering
- Netzsch Simultaneous Thermal Analyzer (STA)
- Specimen Preparation Instruments
- Instrument Status and Rules
- IMRI Instruments
- For Users
- For Industry
- Research
- Education
- News & Events
- News
- UCI scientists develop method for observing nanocrystal formation at atomic resolution
- Grand Opening of UC Irvine Materials Research Institute (IMRI)
- Nature Materials News & Views Published: 14 October 2019
- Nature Materials, Oct 14, 2019: doi:10.1038/s41563-019-0485-2
- UCI Scientists Create New Class of Two-dimensional Materials
- Research Highlights
- Announcements
- Seminars and Events
- liquid phase electron microscopy
- IMRI Special Seminar: The value of In Situ TEM
- IMRI special seminar:Molecular Design for Reliable Organic Electronics
- Imaging Materials Properties at the Nanoscale
- IMRI Special Seminar: Exploiting Functional Materials
- IMRI special seminar: Development and Characterization of Synthetic Polymers for Medical Applications
- News
You are here
FEI XL-30 FEGSEM
Philips XL-30 FEG SEM is located in room 140 Engineering Tower (building 303 on UCI campus map)
Philips XL-30 FEG SEM with EDS (Noran 6) system is a thermionic field emission SEM which is fully automatic gun configuration controlled by advanced computer technology. The magnification is up to 800,000X with 2nm resolution. It is easy to use for examining and survey the morphology of the nano devices. This XL30 also equipped with EDS detector to provide the composition information. See SEM Philips XL30 Manual (pdf) for detailed operation procedures.
Performance Resolution:
1.5nm at 10kV or higher
2.5nm at 1kV
Electron Source:
Schottky-based thermionic field emission electron gun
Fully automatic gun configuration control
Continuously variable beam acceleration voltage range 0.2~30KV
Beam current range 1pA~25nA
Specimen Stage:
Eucentric goniometer: 4-axis (X, Y, Z and R ) motorized stage with full manual override
Tilt rage: - 15 ~ 60 degree
Drawer type entry for specimen exchange
Specimen chamber diameter 284 mm
Vacuum:
Automatic vacuum interlock
One diffusion pump (lower chamber), two ion getter pumps (gun chamber)
Gun chamber: 2x10-7 Pa
Specimen chamber: 2x10-5 Pa
Vacuum regained: < 5 minutes
Scanning System:
Survey mode, scan mode, and scan rotations
Magnification rage: 20-80,0000X
Analytical Capability:
Secondary electron (SE) detector
Back-scattered electron (BSE) detector
Energy dispersive X-ray spectrometer (EDS)