Philips XL-30 FEG SEM with EDS (Noran 6) system is a thermionic field emission SEM which is fully automatic gun configuration controlled by advanced computer technology. The magnification is up to 800,000X with 2nm resolution. It is easy to use for examining and survey the morphology of the nano devices. This XL30 also equipped with EDS detector to provide the composition information. See SEM Philips XL30 Manual (pdf) for detailed operation procedures.

Performance Resolution:
1.5nm at 10kV or higher 
2.5nm at 1kV

Electron Source:
Schottky-based thermionic field emission electron gun
Fully automatic gun configuration control
Continuously variable beam acceleration voltage range 0.2~30KV
Beam current range 1pA~25nA

Specimen Stage:
Eucentric goniometer: 4-axis (X, Y, Z and R ) motorized stage with full manual override
Tilt rage: - 15 ~ 60 degree
Drawer type entry for specimen exchange
Specimen chamber diameter 284 mm

Vacuum:
Automatic vacuum interlock 
One diffusion pump (lower chamber), two ion getter pumps (gun chamber)
Gun chamber: 2x10-7 Pa
Specimen chamber: 2x10-5 Pa
Vacuum regained: < 5 minutes

Scanning System:
Survey mode, scan mode, and scan rotations
Magnification rage: 20-80,0000X

Analytical Capability:
Secondary electron (SE) detector 
Back-scattered electron (BSE) detector
Energy dispersive X-ray spectrometer (EDS)